Silicon-Based Material and Devices, Two-Volume Set —— Materials and Processing, Properties and Devices

----- 硅基材料和器件，两卷集：材料和加工，特性和器件

ISBN: 9780125139090 出版年：2001 页码：646 Academic Press_RW

This book covers a broad spectrum of the silicon-based materials and their device applications. This book provides a broad coverage of the silicon-based materials including different kinds of silicon-related materials, their processing, spectroscopic characterization, physical properties, and device applications.This two-volume set offers a selection of timely topics on silicon materials namely those that have been extensively used for applications in electronic and photonic technologies. The extensive reference provides broad coverage of silicon-based materials, including different types of silicon-related materials, their processing, spectroscopic characterization, physical properties, and device applications. Fourteen chapters review the state of the art research on silicon-based materials and their applications to devices. This reference contains a subset of articles published in AP's recently released Handbook of Advanced Electronic and Photonic Materials and Devices ( 2000, ISBN 012-5137451, ten volumes) by Dr. Hari Nalwa. This two-volume work strives to present a highly coherent coverage of silicon-based material uses in the vastly dynamic arena of silicon chip research and technology.Key Features* Covers silicon-based materials and devices* Include types of materials, their processing, fabrication, physicalproperties and device applications* Role of silicon-based materials in electronic and photonic technology* A very special topic presented in a timely manner and in a format