Organometallic Vapor-Phase Epitaxy —— Theory and Practice

----- 有机金属气相外延：理论与实践

ISBN: 9780126738421 出版年：1999 页码：453 Stringfellow, Gerald B Academic Press_RM

Overview of the OMVPE Process. Thermodynamics. Physical Processes Occurring on the Surface. Source Molecules. Kinetics. Hydrodynamics and Mass Transport. Design of the OMVPE Process. Specific Materials. Superlattice Structures. Devices.