Nano and Giga Challenges in Microelectronics

ISBN: 9780444514943 出版年：2003 页码：264 Greer, J Korkin, A Labanowski, J Elsevier Science_RM

Preface. 1. Integrated Circuit Technologies: From Conventional CMOS to the nanoscale era (P. M. Zeitzoff, J. A. Hutchby, G. Bersuker, H. R. Huff). 2. Electronics Below 10 nm (K. Likharev). 3. Lithography: Concepts, Challenges, and Prospects (K. Lucas, S. Postnikov, C. Henderson, S. Hector). 4. Experimental Investigations of the Stability of Candidate Materials for High-K Gate Dielectrics in Silicon-Based MOSFETs (S. Stemmer and D. G. Schlom). 5. Defects in wide-gap oxides: Computer modelling and challenges (A. L Shluger, A. Foster, J.L. Gavartin, P.V. Sushko). 6. Tunneling Through Single Molecules (J. Tomfohr, Jun Li, O. Sankey). 7. Practical Quantum Computing (P. M. Lenahan). Subject. Index.